By J Reece Roth
Written through a number one specialist within the box, the paperback variation of business Plasma Engineering, quantity 2: functions to Nonthermal Plasma Processing presents a historical past within the ideas and functions of low temperature, partly ionized Lorentzian plasmas which are used industrially. The e-book additionally provides an outline of plasma-related methods and units which are of business curiosity. The textual content is acceptable for college students or in-service clients with a physics and calculus history on the sophomore point. those volumes are meant for use as textbooks on the senior or first-year graduate point by means of scholars from all engineering and actual technology disciplines and as a reference resource by way of in-service engineers.
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Additional info for Industrial Plasma Engineering: Applications (Industrial Plasma Engineering, Vol 2)
37) For sputtering by monoenergetic ion beams of energy E i eV and mass m i , the ion velocity is found from the kinetic energy, vi = 2eE i mi m/s. 39) where n i is the beam number density in ions/m3 . 35), the erosion velocity of an ion beam can be expressed as Veb = ε Ji A ε An i = eρ A0 ρ A0 2eE i mi m/s. 40) is expressed in m/s, in industrial applications the erosion/deposition rate is sometimes expressed in µm/hr. In depositing thin films, a deposition rate (which normally cannot exceed the erosion rate of the material that produced it) of the order of 10 µm/hr is of interest in many applications.
When English-speaking engineers translated the seminal German plasma papers in the mid-20th century, the technical dictionary of choice was DeVries’ German– English Science Dictionary (1959). This otherwise excellent dictionary defines ‘glimmentladung’ (the German term) as ‘silent discharge’, its supposed English 44 ATMOSPHERIC PRESSURE PLASMA SOURCES equivalent. This is contrary to the meaning of ‘glimmer’, which means ‘glow’ in German. This error has propagated widely in the English industrial plasma literature.
Electrons of either atom can be excited or stripped, causing further ionization. These interactions give rise to electronic stopping. (2) Nuclear collisions, in which the collisions are dominated by the atomic mass of the ions and target atoms, which is concentrated in their nuclei. Such interactions give rise to nuclear stopping, which can result in sudden changes in direction, and even displacements of target atoms from lattice sites. This terminology is unfortunate since, in the field of solid state physics, ‘nuclear collisions’ do not involve nuclear forces or interactions, the meaning normally understood in fusion research and nuclear physics.